Every once in a while, a small modification or upgrade to an existing piece of equipment can have a huge positive impact on production and output. Such is the case with Ichor’s new collimated endpoint upgrade for the Lam Research TCP® 9400 and TCP® 9600, used for Conductor and Metal Etch applications.
Ichor’s upgraded endpoint applies a proven design from later Lam platforms to the SCE TCP® family. This design feature extends mean time between cleans (MTBC) thanks to an undiminished end point signal during the clean cycle. The later platforms/modules, to which it was first applied, saw an increase of more than 20% in MTBC. This increase in MTBC transferred to the SCE (Single Chamber Etch) systems will provide a significant boost to their performance.
The new feature also utilizes an enhanced end point detector (EPD) to provide a more stable endpoint signal. As a result of this key design upgrade, semiconductor manufacturers can experience a lower cost of consumables (CoC) due to the simplified window design and higher equipment availability resulting from the increased MTBC.
Ichor Systems continues to find ways to innovate and provide solutions that enable our customers to improve utilization and enhance this equipment. Our relationships with key semiconductor equipment manufacturers and our engineering expertise allow us to provide quality solutions to complex issues. To learn more about how we serve manufacturers with legacy equipment, please view our refurbished tools program. Contact us to learn how we can help you.