Ichor Systems Ltd has completed another system refurbishment for one of its valued customers.
The TCP® 9600 system uses Lam’s patented TCP® technology and offers several key benefits for metal etch.
- The TCP® technology creates an inductively coupled, high-density plasma directly above the wafer while operating at low pressure
- Independent control of ion generation and ion energy make it possible for etch processes to be optimized, yielding excellent etch rates, profile control, and critical dimensions while ensuring minimal damage.
We offer a wide variety of other Lam Research Etch equipment. For tips on how to find and procure refurbished semiconductor tools, please download our buyer's guide.