Ichor Systems Ltd has shipped its 30th refurbished TCP 9600 system, expanding its leading role in the semiconductor tool refurbishment market.
Ichor is the most experienced supplier of Lam Research refurbished single chamber etch semiconductor equipment, and this marks a milestone for TCP 9600 systems completed. Overall, Ichor has shipped more than 700 systems of all types, re-affirming its role as the exclusive license holder for this equipment type. Ichor's refurbished tools program allows us to match existing tool configurations to provide an exact copy of the customer’s configuration and match the customer’s existing install base. Along with our in house expertise, our industry relationships ensure availability of the information needed for this, including access to OEM supply chains and a full library of technical documentation for supporting systems in the field.
Top features of the TCP 9600 system for wafer fabrication include:
- Creation of an inductively coupled, high-density plasma directly above the wafer while operating at low pressure
- Independent control of ion generation and ion energy for optimal etch processes, resulting in higher etch rates, profile control, and critical dimensions while ensuring minimal damage.
For more on Ichor's TCP 9600 services and other Lam Research Equipment capabilities, please view our refurbished semiconductor equipment program.